摘要: This book chapter deals with the preparation of Si/SiO2 superlattices (SLs). It is organized in several parts dealing progress made SL research a special focus on (1) methods developed for Si-based deposition and different parameters affecting structural optical properties SLs, (2) techniques used characterization SLs from both theoretical experimental aspects, (3) (photoluminescence, PL electroluminescence, EL) (4) examples other structures, (5) perspectives.