Dielectric Constant of Boron Nitride Films Synthesized by Plasma-Assisted Chemical Vapor Deposition
作者： Takashi Sugino , Tomoyoshi Tai
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摘要: … a metal/insulator/ semiconductor (MIS) structure of Au/BN/Si at room temperature. A tungsten … the capacitance in the accumulation region of the Au/BN/pSi sample and the film thickness. …
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ipap.jp参考文章(4)
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