Silicon aggregates produced by laser beam in a silicon carbide surface

作者: Pham V. Huong , O. Segond , P. Gentilini , R. Cavagnat

DOI: 10.1016/0169-4332(89)90221-3

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摘要: Abstract Silicon carbide is a material with potential for the fabrication of composites and coatings in sensitive organs space vectors vessels. We have examined effect laser shot on silicon coating deposited graphite substrate. Micro-Raman spectroscopy was revealed to be very suitable tool study structure evolution, physically as well chemically. shown that completely disappeared while formed. The shots onto samples placed under controlled atmospheres, containing variable pressures oxygen nitrogen, allows mechanism carbon departure deduced. formation dimers, trimers tetramers matrix, also seen dependending power reaching target. These species specific spectral characteristics which are quite different from bulk silicon.