POWER CONVERTER AND POWER SUPPLY SYSTEM
作者： Klimczak Andrzej
DOI:
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摘要: A power converter (3) configured to generate a high-frequency signal comprises at least one amplifier stage (40) having first and second paths (42, 43) each an (42a, 43a), the path (42) outputting output (43) that, with respect signal, has phase shift greater than 0° less 180°. The are connected phase-shifting coupler (47) that is couple signals form signal. At 43a) of SiC MOSFET.
lens.org 参考文章(8)
Charles Coleman, RF generator with commutation inductor ,(2005)
Leonid E. Reyzelman, John E. Sortor, Method and apparatus for VHF plasma processing with load mismatch reliability and stability ,(2002)
Christoph Hofstetter, Gerd Dr. Hintz, Michael Glück, Vacuum plasma generator ,(2006)
Anton Labanc, Plasma Supply Arrangement Having Quadrature Coupler ,(2012)
Michael Glück, Christian Thome, Hans-Jürgen Windisch, Ekkehard Mann, Measuring method and device for a plasma supply device ,(2008)
Daniel Gruner, Alexander Alt, Anton Labanc, Andre Grede, Power supply systems and methods for generating power with multiple amplifier paths ,(2016)
Ken Tran, Feng Tian, Direct three phase parallel resonant inverter for reactive gas generator applications ,(2015)
Gruner Daniel, Alt Alexander, Grede Andre, Labanc Anton, Power combiner having a symmetrically arranged cooling body and power combiner arrangement ,(2018)