Power supply systems and methods for generating power with multiple amplifier paths
作者： Daniel Gruner , Alexander Alt , Anton Labanc , Andre Grede
DOI:
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摘要: A power supply system includes a converter configured to generate high-frequency signal and be connected load plasma process or gas laser with power. The at least one amplifier stage having first second paths each an amplifier. path are phase-shifting coupler unit that is couple phase-shifted output signals from the form signal. At of field effect transistor implemented in semiconductor device structure substantially layered construction, channel, current flowing channel parallel layers structure.
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