Customized shield plate for a field effect transistor

作者: Agni Mitra , David C. Burdeaux

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摘要: A customized shield plate field effect transistor (FET) includes a semiconductor layer, gate dielectric, electrode, and at least one plate. The conductive layer overlying portion of the electrode sidewalls, substrate adjacent to sidewall. defines edge its lateral boundary. distance between sidewall varies along length may form triangular, curved, other shaped elements. configuration reduce area resulting capacitor thereby achieve lower parasitic capacitance associated with FET. FET be implemented as diffused MOS (LDMOS) suitable for high power radio frequency applications.

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