High voltage semiconductor devices and methods for their fabrication

作者: Philippe Renaud , Zihao M. Gao

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摘要: Semiconductor devices include a semiconductor substrate containing source region and drain region, gate structure supported by the between composite drift in substrate, extending laterally from to at least an edge of structure, including dopant having first conductivity type, wherein portion is buried beneath depth exceeding ion implantation range, well substrate. The has second type configured form channel therein under during operation. Methods for fabrication are described.

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