POWER CONVERTER, POWER SUPPLY SYSTEM AND HF PLASMA SYSTEM
作者： Klimczak Andrzej , Lewandowski Konrad , Golan Marcin
DOI:
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摘要: A power converter (3) configured to generate a high-frequency signal comprises at least one amplifier stage (40) having first and second paths (42, 43) each an (42a, 43a), the path (42) outputting output (43) that, with respect signal, has phase shift greater than 0° less 180°. The are connected phase-shifting coupler (47) that is couple signals form signal. At 43a) of SiC MOSFET.
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