Method for matching the impedance of the Output Impedance of a High-Frequency Power Supply Arrangement to the Impedance of a Plasma Load and High-Frequency Power Supply Arrangement
作者： Rolf Merte
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摘要: A method for matching the impedance of output a high-frequency power supply arrangement to plasma load includes, in first mode, by changing frequency signal produced. If is outside specified range, second mode matched mechanically or electrically modifying circuit which arranged downstream producer.
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