DETERMINATION OF RESIDUAL-STRESS IN COATINGS BY A MEMBRANE DEFLECTION TECHNIQUE
作者： Robert M. Jennings , Jeffrey F. Taylor , Richard J. Farris
DOI: 10.1080/00218469508009977
关键词:
摘要: Abstract A membrane deflection technique has been developed to measure the isotropic residual stress in biaxially-constrained coatings. The demonstrated on various materials, including polyimide, latex rubber and photoresist Stress values obtained from compared well with results time-averaged vibrational holographic interferometry except for samples where rigidity effects were found be important. criterion based thickness, rigidity, sample radius is also discussed, establishing applicability of low rigidity.
sci-hub.se 参考文章(12)
SPTS Woinowsky-Krieger, S Timoshenko, None, THEORY OF PLATES AND SHELLS Engineering Societies Monographs. ,(1959)
Mark G. Allen, Mehran Mehregany, Roger T. Howe, Stephen D. Senturia, Microfabricated structures for the in situ measurement of residual stress, Young’s modulus, and ultimate strain of thin films Applied Physics Letters. ,vol. 51, pp. 241- 243 ,(1987) , 10.1063/1.98460
K. Chopra, Julius Klerrer, Thin film phenomena ,(1969)
EI Bromley, JN Randall, DC Flanders, RW Mountain, A technique for the determination of stress in thin films Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. ,vol. 1, pp. 1364- 1366 ,(1983) , 10.1116/1.582744
M. L. Williams, The continuum interpretation for fracture and adhesion Journal of Applied Polymer Science. ,vol. 13, pp. 29- 40 ,(1969) , 10.1002/APP.1969.070130105
Jeffrey Facer Taylor, An experimental evaluation of the state of stress and mechanical performance of a polyacrylate photoresist coating ,(1993)
Hans Dannenberg, Measurement of adhesion by a blister method Journal of Applied Polymer Science. ,vol. 5, pp. 125- 134 ,(1961) , 10.1002/APP.1961.070051401
Michele A. Maden, Richard J. Farris, Stress Measurement in Spin Coated Polyimide Films Using Time Average Holographic Interferometry MRS Proceedings. ,vol. 154, ,(1989) , 10.1557/PROC-154-143
Michele A. Maden, Kun Tong, Richard J. Farris, Measurement of Stresses in Thin Films Using Holographic Interferometry: Dependence on Atmospheric Conditions MRS Proceedings. ,vol. 188, ,(1990) , 10.1557/PROC-188-29
A. Jagota, S. Mazur, R. J. Farrisf, A Vibrational Technique for Stress Measurement in Films MRS Proceedings. ,vol. 188, ,(1990) , 10.1557/PROC-188-35