Influence of the Zn plasma kinetics on the structural and optical properties of ZnO thin films grown by PLD
作者： J. A. Guerrero de León , A. Pérez-Centeno , G. Gómez-Rosas , A. Mariscal , R. Serna
DOI: 10.1007/S42452-019-0497-1
关键词:
摘要: We analyze the effect of average kinetic energy Zn ions on crystalline orientation and quality, along with its optical response ZnO thin films deposited by reactive pulsed laser deposition. With use attenuators, plasma density was kept constant while mean ion varied from 40 to 100 eV. The results show that are polycrystalline a preferential [101] direction. As in is increased, degree crystallinity decreased. preferred found be plasma-related effect. high transmittance visible range an intense UV photoluminescence emission, which associated excitonic recombination.
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sci-hub.se 参考文章(45)
Shao-lan Li, Li-chun Zhang, Yan-feng Dong, Feng-zhou Zhao, Optical properties of ZnO thin films grown on diamond-like carbon by pulsed laser deposition Optoelectronics Letters. ,vol. 8, pp. 445- 448 ,(2012) , 10.1007/S11801-012-2295-5
ZnO Nanocrystals and Allied Materials Springer Series in Materials Science. ,vol. 180, ,(2014) , 10.1007/978-81-322-1160-0
M. S. Al-Assiri, M. M. Mostafa, M. A. Ali, M. M. El-Desoky, Optical Properties of Annealed ZnO Thin Films Fabricated by Pulsed Laser Deposition Silicon. ,vol. 7, pp. 393- 400 ,(2015) , 10.1007/S12633-015-9301-Z
Gerhard Franz, None, Low Pressure Plasmas and Microstructuring Technology ,(2009)
Paul S. Banks, Michael D. Perry, Brent C. Stuart, Ultrashort pulse laser deposition of thin films ,(2000)
Andreé Gorbunoff, Cross‐Beam PLD: Metastable Film Structures from Intersecting Plumes John Wiley & Sons, Inc.. pp. 131- 160 ,(2006) , 10.1002/9780470052129.CH6
Mikhail D. Strikovski, Jeonggoo Kim, Solomon H. Kolagani, Plasma Energetics in Pulsed Laser and Pulsed Electron Deposition Springer Handbook of Crystal Growth. pp. 1193- 1211 ,(2010) , 10.1007/978-3-540-74761-1_35
Ji-Jie Huang, Yu-Ping Wang, Jian-Guo Lu, Li Gong, Zhi-Zhen Ye, Transparent Conductive Al-Doped ZnO/Cu Bilayer Films Grown on Polymer Substrates at Room Temperature Chinese Physics Letters. ,vol. 28, pp. 127306- 127306 ,(2011) , 10.1088/0256-307X/28/12/127306
S. Angappane, N. R. Selvi, G. U. Kulkarni, ZnO(101) films by pulsed reactive crossed-beam laser ablation Bulletin of Materials Science. ,vol. 32, pp. 253- 258 ,(2009) , 10.1007/S12034-009-0038-4
B. Kulyk, B. Sahraoui, V. Figà, B. Turko, V. Rudyk, V. Kapustianyk, Influence of Ag, Cu dopants on the second and third harmonic response of ZnO films Journal of Alloys and Compounds. ,vol. 481, pp. 819- 825 ,(2009) , 10.1016/J.JALLCOM.2009.03.117