Smart RF pulsing tuning using variable frequency generators
作者： Kawasaki Katsumasa
DOI:
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摘要: Methods and systems for RF pulse reflection reduction are provided herein. In some embodiments, a method includes (a) receiving process recipe processing the substrate that plurality of pulsed power waveforms from generators during first duty cycle, (b) dividing cycle into equal time intervals, (c) each generator, determining frequency command set all intervals send to wherein point in (d) providing chamber according sent generator.
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