SPLASH MONITOR DEVICE FOR CONTINUOUS VACUUM VAPOR DEPOSITION APPARATUS

摘要: PROBLEM TO BE SOLVED: To provide a splash monitor device for vacuum vapor deposition apparatus capable of preventing the generation splashes and damage rolls breakage steel sheet by these splashes. SOLUTION: This has window 12 disposed in film forming chamber 6, CCD camera 14 which monitors molten metal 4 crucible 5 through this controller 16 controls output an electron gun 3 subjecting image to processing detecting moment before The temp. change or waving is detected from decreased.