Characterization of quasi-rugate filters using ellipsometric measurements
作者： Alexander V. Tikhonravov , Michael K. Trubetskov , Jiřín Hrdina , Jaroslav Sobota
DOI: 10.1016/0040-6090(95)08003-1
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摘要: A sample with a quasi-inhomogeneous refractive index profile has been prepared by r.f. magnetron sputtering mixing very thin layers of SiO2 and Al2O3. It proved that the is, to accuracy our experiment, undistinguishable from smoothly inhomogeneous profile. This effective was then established measured ellipsometric data new method based on Tikhonov's regularization technique. As uses some a-priori information system, results are rather qualitative but they seem reveal depth profiles extinction coefficient as well their dispersion.
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