Twisted blade tangential fan for excimer laser

摘要: A tangential fan, configured to recirculate a lasing gas mixture, has blade members, which are twisted in substantially helical fashion about the rotation axis of fan. The circumferential number members can be constant variable between end flanges. position shift monotonically or reversibly two ends. fan accordance with invention made using conventional method brazing together individually stamped and formed hub members. Finishing processes typically include post-machining, electropolishing, electroless nickel coating.