Gas laser device and exposure apparatus using the same
作者： Yoshiyuki Nagai , Naoto Sano
DOI:
关键词:
摘要: In a gas laser device, sealingly stored in chamber is excited using discharging electrode that electrically discharged. Laser light produced by the electrical totally reflected total reflection mirror. An output window partially reflects and outputs portion of between mirror window. A blower circulates within so passing an region circulated returned to electrode. The operated according state from operation includes operating rotation stand-by which no said emitted but device condition light, in-operation discharge outputted.
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