Cracking during Pyrolysis of Oxide Thin Films‐Phenomenology, Mechanisms, and Mechanics

作者: San-Yuan Chen , I-Wei Chen

DOI: 10.1111/J.1151-2916.1995.TB09066.X

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摘要: Cracking phenomena of oxide (BaTiO{sub 3} and Pb(Zr{sub 1{minus}x}Ti{sub x})O{sub 3}) thin films prepared from metal carboxylate alkoxide solutions were studied. At a higher heating rate in reducing atmosphere, cracks formed with morphology similar to that seen dried mud or on cracked glazes. lower an O{sub 2} apparently degassing bubbles small crystallites, starlike, short cracks. The critical conditions for these two cracking modes associated transient stress maxima during pyrolysis: first at intermediate temperature, when the maximum weight loss occurred, then toward completion pyrolysis, as nearly ceramic state was approached. A viscous analysis fracture energy considerations used rationalize observed scaling relations between crack thickness, spacing, processing parameters.

参考文章(22)
J.W. Hutchinson, Z. Suo, Mixed mode cracking in layered materials Advances in Applied Mechanics. ,vol. 29, pp. 63- 191 ,(1991) , 10.1016/S0065-2156(08)70164-9
S.L. Swartz, S.D. Ramamurthi, J. R. Busch, V.E. Wood, Sol-Gel Pzt Films for Optical Waveguides MRS Proceedings. ,vol. 243, pp. 533- ,(1991) , 10.1557/PROC-243-533
M. E. Gross, M. Hong, S. H. Liou, P. K. Gallagher, J. Kwo, Versatile new metalorganic process for preparing superconducting thin films Applied Physics Letters. ,vol. 52, pp. 160- 162 ,(1988) , 10.1063/1.99038
E. Olsson, A. Gupta, M. D. Thouless, A. Segmüller, D. R. Clarke, Crack formation in epitaxial [110] thin films of YBa2Cu3O7−δand PrBa2Cu3O7−xon [110]SrTiO3substrates Applied Physics Letters. ,vol. 58, pp. 1682- 1684 ,(1991) , 10.1063/1.105110
Guanghua Yi, Zheng Wu, Michael Sayer, Preparation of Pb(Zr,Ti)O3 thin films by sol gel processing: Electrical, optical, and electro‐optic properties Journal of Applied Physics. ,vol. 64, pp. 2717- 2724 ,(1988) , 10.1063/1.341613
Jun Fukushima, Kohei Kodaira, Toru Matsushita, Preparation of ferroelectric PZT films by thermal decomposition of organometallic compounds Journal of Materials Science. ,vol. 19, pp. 595- 598 ,(1984) , 10.1007/BF02403247
San-Yuan Chen, I-Wei Chen, Temperature–Time Texture Transition of Pb(Zr1−xTix)O3 Thin Films: II, Heat Treatment and Compositional Effects Journal of the American Ceramic Society. ,vol. 77, pp. 2337- 2344 ,(1994) , 10.1111/J.1151-2916.1994.TB04603.X
AZIZ S. SHAIKH, GERALDINE M. VEST, Kinetics of BaTiO3 and PbTiO3 Formation from Metallo‐organic Precursors Journal of the American Ceramic Society. ,vol. 69, pp. 682- 688 ,(1986) , 10.1111/J.1151-2916.1986.TB07471.X
M. D. Thouless, Crack Spacing in Brittle Films on Elastic Substrates Journal of the American Ceramic Society. ,vol. 73, pp. 2144- 2146 ,(1990) , 10.1111/J.1151-2916.1990.TB05290.X
J. Xu, A.S. Shaikh, R.W. Vest, High K BaTiO/sub 3/ films from metalloorganic precursors IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control. ,vol. 36, pp. 307- 312 ,(1989) , 10.1109/58.19168