Valuation method of dielectric breakdown lifetime of gate insulating film, valuation device of dielectric breakdown lifetime of gate insulating film and program for evaluating dielectric breakdown lifetime of gate insulating film
作者： Shimpei Tsujikawa
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摘要: A valuation method of a dielectric breakdown lifetime gate insulating film for evaluating the MOS type element includes steps of: deciding Weibull slope distribution until reaching soft element; detection condition from decided after above step; and executing test by using condition.
lens.org 参考文章(8)
Yasuko Hanagama, Kiyoshi Nikawa, Toyokazu Nakamura, Apparatus for diagnosing interconnections of semiconductor integrated circuits ,(1994)
Okada Kenji, METHOD OF ESTIMATING DIELECTRIC BREAKDOWN LIFE TIME OF INSULATING FILM ,(2007)
Hagishima Daisuke, Mitani Yuichiro, Kinoshita Atsuhiro, DEVICE, METHOD AND PROGRAM FOR JUDGING MINUTE CHANGE ,(2004)
Koizumi Nobue, Takeda Ryuji, METHOD FOR EVALUATING NITRIDE ON SURFACE OF SILICON WAFER ,(2002)
Cho Giichi, REMAINING LIFE ASSESSMENT DEVICE OF ROTATING MACHINE STATOR COIL ,(2008)
Mitsuaki Hori, Mayumi Shigeno, Naoyoshi Tamura, Semiconductor device, evaluation method, and process condition evaluation method ,(2006)
Yoshinao Harada, Semiconductor device and method for producing the same ,(2003)