Monte Carlo modeling of electron-excited X-ray emission from bulk materials and thin-film/substrate systems
作者： T. Nagatomi
DOI: 10.1002/SIA.2106
关键词:
摘要: A Monte Carlo (MC) simulation model for the calculation of electron-excited X-ray spectra was developed. The includes characteristic K- and L-lines continuous emission by electron impact, fluorescent following absorption X rays, L-line K-shell ionization Coster-Kronig transitions. simulated were directly compared with experimental without any fitting parameters. This comparison revealed that K-line peak intensities can be well reproduced present simulation. applications Gryzinski's Casnati's cross sections to L-shell resulted in underestimation intensity 10 ∼30% overestimation 20 ∼40%, respectively. equation found applicable describing MC modeling when transition neglected. Copyright © 2005 John Wiley & Sons, Ltd.
sci-hub.se 参考文章(33)
James R. Sandifer, Jacob J. Voycheck, Monte Carlo Simulation of Secondary Fluorescence in Small Particles and at Phase Boundaries Mikrochimica Acta. ,vol. 132, pp. 205- 212 ,(2000) , 10.1007/S006040050013
Joy, The efficiency of X‐ray production at low energies Journal of Microscopy. ,vol. 191, pp. 74- 82 ,(2008) , 10.1046/J.1365-2818.1998.00329.X
Walter Heitler, The quantum theory of radiation ,(1936)
D. F. Kyser, K. Murata, Quantitative electron microprobe analysis of thin films on substrates Ibm Journal of Research and Development. ,vol. 18, pp. 352- 363 ,(1974) , 10.1147/RD.184.0352
J. W. Motz, R. C. Placious, Bremsstrahlung Cross-Section Measurements for 50-kev Electrons Physical Review. ,vol. 109, pp. 235- 242 ,(1958) , 10.1103/PHYSREV.109.235
Changhuan Tang, Zhu An, Zhengming Luo, Mantian Liu, Measurements of germanium K-shell ionization cross sections and tin L-shell x-ray production cross sections by electron impact Journal of Applied Physics. ,vol. 91, pp. 6739- 6743 ,(2002) , 10.1063/1.1470248
Masaaki Yasuda, Shunji Yamauchi, Hiroaki Kawata, Kenji Murata, Quantitative electron microprobe analysis of aluminum, copper, and gold thin films on silicon substrates Journal of Applied Physics. ,vol. 92, pp. 3404- 3409 ,(2002) , 10.1063/1.1502923
C. S. Campos, M. A. Z. Vasconcellos, X. Llovet, F. Salvat, Measurements of L-shell x-ray production cross sections of W, Pt, and Au by 10 -30-keV electrons Physical Review A. ,vol. 66, pp. 012719- ,(2002) , 10.1103/PHYSREVA.66.012719
J. J. Vrakking, F. Meyer, Electron-impact-ionization cross sections of inner shells measured by Auger- electron spectroscopy Physical Review A. ,vol. 9, pp. 1932- 1937 ,(1974) , 10.1103/PHYSREVA.9.1932
E Casnati, A Tartari, C Baraldi, An empirical approach to K-shell ionisation cross section by electrons Journal of Physics B. ,vol. 15, pp. 155- 167 ,(1982) , 10.1088/0022-3700/15/1/022