Failure mechanisms and fault classes for CMOS-compatible microelectromechanical systems
作者： A. Castillejo , D. Veychard , S. Mir , J.M. Karam , B. Courtois
关键词:
摘要: Silicon-compatible micromachining provides a low cost monolithic solution for the integration of microelectromechanical systems (MEMS). In last years, CMP (the French MultiProject Wafer Service) has made available technological solutions fabrication CMOS-compatible MEMS. Numerous devices have been fabricated using this service. The inspection failed allowed identification most typical failure mechanisms and design errors type This valuable information, together with detailed analysis processes, is used in paper to provide classification faults silicon-compatible MEMS which can later be fault simulation testing.
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