Generation of Electrically Induced Stimuli for MEMS Self-Test

摘要: A major task for the implementation of Built-In-Self-Test (BIST) strategies MEMS is generation test stimuli. These devices can work in different energy domains and are thus designed to sense signals which generally not electrical. In this work, we describe, types MEMS, how required non-electrical stimuli be induced on-chip by means electrical signals. This provides basis adding BIST parts embedded coming integrated systems. The signal illustrated case transducers exploit such physical principles as time-varying electrostatic capacitance, piezo-resistivity effect Seebeck effect. used accelerometers, infrared imagers, pressure sensors or tactile sensors. For implementation, have two technologies including CMOS-compatible bulk micromachining surface micromachining. We illustrate ability generate implement a self-test strategy complete application. corresponds an imager that multiple applications overheating detection, night vision, earth tracking satellite positioning. consists array thermal pixels radiation. Each pixel implemented suspended membrane contains several thermopiles along support arms. proposed requires only slight modifications allows production with standard equipment, without need special sources associated optical equipment. function also activated off-line field validation maintenance purposes.