High-level fault modeling in surface-micromachined MEMS

摘要: MEMS structures rendered defective by particles are modeled a tthe scehamtic-level using existing models of fault-free primitives within the nodal simulator NODAS. We have compared results schematic-level fault simulations with low-level finite element analysis and demonstrated efficacy such an approach. Analysis shows that NODAS achieves 60X speedup over FEA little accuracy loss in modeling defects caused particles.© (2000) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading abstract is permitted personal use only.