Generation of component level fault models for MEMS
作者： R. Rosing , R. Reichenbach , A. Richardson
DOI: 10.1016/S0026-2692(02)00097-6
关键词:
摘要: Component level (nodal) simulations have been proposed to both implement closed loop simulation of complete microsystems support the migration shorter design cycles and fault models micromechanical components. Within such a environment, library cells in form behavioural are used for basic components microelectromechanical (MEM) transducers, as beams, plates, comb-drives membranes. This paper presents methodologies generate model parameters required implementation accurate component results from representative defective structures MEMS product.
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