摘要: New design tools and automation strategies are neededto create robust, cost-effective, manufacturable micro-machineddevices systems. Some of the automationissues include mixed-technology simulation, materialproperty prediction in micron-size regime, self-consistencyin coupled electromechanical devices, integratedmodeling environment, micro-fluid modeling, synthesisof device geometries process flows. Advancement inthese areas will path way to full-scale maturity theMEMS field.
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