Miniaturised friction force measuring system for tribological research on magnetic storage devices
作者： J.F. Burger , G.-J. Burger , T.S.J. Lammerink , S. Imai , J.H.J. Fluitman
DOI: 10.1109/MEMSYS.1996.493836
关键词: Head (vessel) 、 Moment (physics) 、 Piezoresistive effect 、 Suspension (vehicle) 、 Disk storage 、 Slider 、 Tribology 、 Magnetic storage 、 Mechanical engineering 、 Electrical engineering 、 Materials science
摘要: In this paper a silicon head slider suspension with integrated piezoresistive friction force sensors is presented. This device can be used for tribological research on magnetic rigid disk storage devices. Both the tangential and radial forces between disk, as well induced moment, measured simultaneously. Furthermore normal load measured. The focusses design considerations realisation process of suspension. Friction measurements are included to illustrate feasibility system.
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