Effect of impurities on morphology, growth mode, and thermoelectric properties of (1 1 1) and (0 0 1) epitaxial-like ScN films

作者: Grzegorz Greczynski , Per Eklund , Nina Tureson , Nina Stilkerich , Arnaud le Febvrier

DOI: 10.1088/1361-6463/AAEB1B

关键词:

摘要: ScN is an emerging semiconductor with indirect bandgap. It has attracted attention for its thermoelectric properties, use as seed layers, and alloys piezoelectric application. ot ...

参考文章(50)
P.M. Mayrhofer, H. Riedl, H. Euchner, M. Stöger-Pollach, P.H. Mayrhofer, A. Bittner, U. Schmid, Microstructure and piezoelectric response of YxAl1−xN thin films Acta Materialia. ,vol. 100, pp. 81- 89 ,(2015) , 10.1016/J.ACTAMAT.2015.08.019
Panos Patsalas, Nikolaos Kalfagiannis, Spyros Kassavetis, Optical Properties and Plasmonic Performance of Titanium Nitride Materials. ,vol. 8, pp. 3128- 3154 ,(2015) , 10.3390/MA8063128
Carina Höglund, Javier Bareño, Jens Birch, Björn Alling, Zsolt Czigány, Lars Hultman, Cubic Sc1−xAlxN solid solution thin films deposited by reactive magnetron sputter epitaxy onto ScN(111) Journal of Applied Physics. ,vol. 105, pp. 113517- ,(2009) , 10.1063/1.3132862
Sit Kerdsongpanya, Björn Alling, Per Eklund, Phase stability of ScN-based solid solutions for thermoelectric applications from first-principles calculations Journal of Applied Physics. ,vol. 114, pp. 073512- ,(2013) , 10.1063/1.4818415
Nina Daneu, Aleksander Rečnik, Takashi Yamazaki, Tadej Dolenec, Structure and chemistry of (111) twin boundaries in MgAl 2 O 4 spinel crystals from Mogok pacific rim conference on multimedia. ,vol. 34, pp. 233- 247 ,(2007) , 10.1007/S00269-007-0142-1
L Hultman, Thermal stability of nitride thin films Vacuum. ,vol. 57, pp. 1- 30 ,(2000) , 10.1016/S0042-207X(00)00143-3
S. C. Wang, Gert Ehrlich, Adatom motion to lattice steps: A direct view Physical Review Letters. ,vol. 70, pp. 41- 44 ,(1993) , 10.1103/PHYSREVLETT.70.41
I. Petrov, P. B. Barna, L. Hultman, J. E. Greene, Microstructural evolution during film growth Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. ,vol. 21, pp. S117- S128 ,(2003) , 10.1116/1.1601610
Brian W. Karr, I. Petrov, David G. Cahill, J. E. Greene, Morphology of epitaxial TiN(001) grown by magnetron sputtering Applied Physics Letters. ,vol. 70, pp. 1703- 1705 ,(1997) , 10.1063/1.118675
Rainer Niewa, Dmitry A. Zherebtsov, Martin Kirchner, Marcus Schmidt, Walter Schnelle, New Ways to High-Quality Bulk Scandium Nitride Chemistry of Materials. ,vol. 16, pp. 5445- 5451 ,(2004) , 10.1021/CM048667Y