Method and apparatus for producing VCSELS with dielectric mirrors and self-aligned gain guide
作者： Richard A. Skogman
DOI:
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摘要: The invention includes a method of fabricating laser device, that includes: depositing photoresist on epitaxially grown layers, patterning said to form an aperture area, dielectric material patterned photoresist, liftoff layer material, removing portions and border implanting regions the layers bordering metal material. also device including: substrate comprising epitaxial mirror formed top area implanted region within area.
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