Handbook on Best Practice for Minimising Beam Induced Damage during IBA

作者: D. Benzeggouta , I. Vickridge

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摘要: This handook is intended as a resource for scientists who use Ion Beam Analysis (IBA), to help them understand and minimise beam damage induced during the analysis. The basic physics of ion-matter interactions, from perspectve by Analysis, presented at level suitable post-graduate students. specificities in widely used IBA techniques such Backscattering Spectrometry (RBS), Nuclear Reaction (NRA), Elastic Recoil Detection (ERDA) Particle-Induced X-ray Emission (PIXE) are presented, followed sections on analysis different classes materials metals, semiconductors or polymers. A comprehensive bibliography included.

参考文章(110)
J.L. Duggan, I.L. Morgan, Application of Accelerators in Research and Industry s.n.. ,(1997)
S. Matsuyama, J. Inoue, K. Ishii, H. Yamazaki, S. Iwasaki, K. Goto, K. Murozono, T. Sato, H. Orihara, An endurance test of Kapton foil in in-air PIXE system The fifteenth international conference on the application of accelerators in research and industry. ,vol. 475, pp. 480- 483 ,(1999) , 10.1063/1.59264
Joseph R. Tesmer, Michael Anthony Nastasi, Handbook of modern ion beam materials analysis Materials Research Society. ,(1995)
B. Lovelace, A. W. Haberl, H. Bakhru, J. C. Kimball, R. E. Benenson, Floyd D. McDaniel, Barney L. Doyle, Microbeam Beam Heating Analysis of Thin Foils Using Heat Conduction Theory APPLICATION OF ACCELERATORS IN RESEARCH AND INDUSTRY: Twentieth International#N#Conference. ,vol. 1099, pp. 287- 291 ,(2009) , 10.1063/1.3120034
Harry A. Atwater, Carl V. Thompson, Henry I. Smith, Ion‐bombardment‐enhanced grain growth in germanium, silicon, and gold thin films Journal of Applied Physics. ,vol. 64, pp. 2337- 2353 ,(1988) , 10.1063/1.341665
L. D. Hansen, J. F. Ryder, N. F. Mangelson, M. W. Hill, K. J. Faucette, D. J. Eatough, Inaccuracies encountered in sulfur determination by particle induced x-ray emission Analytical Chemistry. ,vol. 52, pp. 821- 824 ,(1980) , 10.1021/AC50056A012
R.L Clough, High-energy radiation and polymers: A review of commercial processes and emerging applications Nuclear Instruments & Methods in Physics Research Section B-beam Interactions With Materials and Atoms. ,vol. 185, pp. 8- 33 ,(2001) , 10.1016/S0168-583X(01)00966-1
Kevin J. Orvek, Craig Huffman, Carbonized layer formation in ion implanted photoresist masks Nuclear Instruments & Methods in Physics Research Section B-beam Interactions With Materials and Atoms. ,vol. 7, pp. 501- 506 ,(1985) , 10.1016/0168-583X(85)90421-5
B.J. Kirby, G.J.F. Legge, Ion beam induced damage and element loss during a microanalysis of biological tissue Nuclear Instruments & Methods in Physics Research Section B-beam Interactions With Materials and Atoms. ,vol. 54, pp. 98- 100 ,(1991) , 10.1016/0168-583X(91)95498-3
M.W. Hill, L.D. Hansen, N.F. Mangelson, K.J. Faucette, D.J. Eatough, T.A. Cahill, B. Kusko, Measurement of sample temperatures reached during proton and alpha particle irradiation of thin PIXE targets Nuclear Instruments and Methods. ,vol. 181, pp. 69- 70 ,(1981) , 10.1016/0029-554X(81)90582-6