Tungsten‐carbon multilayer composition and the effects of annealing: A glancing angle extended x‐ray absorption fine structure study

摘要: Results are presented from a glancing angle extended x‐ray absorption fine structure study to investigate the of W/C multilayers and effects moderate annealing. There is evidence considerable interlayer mixing prior any heat treatment. It found that after annealing 350 °C for several hours, drastic changes can occur in structural environment W atoms, with minimal reflectivity sample. extensive formation W2C depending on thickness ratio. Identification this carbide as product unambiguous. Above critical thickness, begins grow its bcc form within layer, it prepared. This layer unaffected by process. The presence carbon shown stabilize amorphous state inhibits when ratio small.