Atomic layer deposition of ultrathin platinum films on tungsten atomic layer deposition adhesion layers: Application to high surface area substrates
作者： Joel W. Clancey , Andrew S. Cavanagh , Ratandeep S. Kukreja , Anusorn Kongkanand , Steven M. George
DOI: 10.1116/1.4901459
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摘要: … be grown as continuous, ultrathin films on Al 2 … ultrathin Pt ALD on W ALD adhesion layers using MeCpPtMe 3 and H 2 plasma. We then build upon these results by depositing ultrathin …
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