Influence of nitrogen annealing on structural and photoluminescent properties of ZnO thin film grown on c-Al2O3 by atmospheric pressure MOCVD

作者: Yufeng Chen , Yong Pu , Li Wang , Chunlan Mo , Wenqing Fang

DOI: 10.1016/J.MSSP.2004.07.006

关键词:

摘要: ZnO thin films on (0001) sapphire large area substrates (Φ50×0.43mm) have been deposited by atmospheric pressure MOCVD. To investigate the effects of post-annealing treatment on …

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