Effects of Growth Conditions on Structural Properties of ZnO Nanostructures on Sapphire Substrate by Metal-Organic Chemical Vapor Deposition.

摘要: ZnO was grown on sapphire substrate by metal–organic chemical vapor deposition using the diethylzinc (DEZn) and oxygen (O2) as source chemicals at 500 °C. Influences of chamber pressure O2/DEZn ratio structural properties were discussed. It found that has significant effects morphology could result in various structures including pyramid-like, worm-like, columnar grain. When kept 10 Torr, lowest full width half-maximum (002) 175 arc second can be obtained. On other hand, lowering DEZn flow rate, crystal quality improved. Under high nanowall-network to grow vertically without any metal catalysts. suggests higher rate promotes three-dimensional growth mode resulting increased surface roughness. Therefore, some tip act nucleation site. In this work, process our nanowall networks is said follow self-catalyzed mechanism under high-DEZn rate.