Spatial analysis of ZnO thin films prepared by vertically aligned MOCVD
作者： Prakash Mishra , Rahi Patel , Babar Hussain , Justin Stansell , Bahadir Kucukgok
DOI: 10.1109/HONET.2014.7029363
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摘要: Zinc Oxide thin films were grown using a homemade metallorganic chemical vapor deposition apparatus with non-centrosymmetric groove for the substrate. Films relatively constant thickness and varying temperatures tested photoluminescence spectrometry, ex-situ spectral reflectance, transmittance measurements at five distinct points. Results are analyzed to evaluate spatial consistency in optical characteristics of ZnO films.
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