Apparatus and method for controlling flow rate of liquid, and storage medium

作者: Keigo Satake

DOI:

关键词:

摘要: Disclosed is a liquid flow rate control apparatus including first unit which includes valve for small with controlled range, and second large range. In particular, an overlapped range present between the ranges flows on either any one or both of units depending variation required value total rate. The maintained other increases while increasing liquids.

参考文章(16)
Ambro Oliva, Michel Bosteels, Calibrated fluid flow control device ,(1984)
Henri J. R. Maget, Electrochemical control valve ,(1990)
Yukichi Takamatsu, Koji Kiriyama, Takeo Yoneyama, Kiichirou Araya, Mitsuhiro Iwata, Method for vaporizing and supplying ,(2002)
Winfried K. Gonner, Digital fluid flow rate controller ,(1978)
Harry Friedland, Multiple element control valve ,(1973)
Toshiyuki Maruoka, 俊幸 丸岡, Method for controlling flow rate of fluid ,(2000)