Flow-rate regulator device, diluted chemical-liquid supply device, liquid processing apparatus and its operating system
作者： Kazuyoshi Eshima , Takami Satoh , Michitaka Amiya , Kazuki Kosai , Akihiro Nakamura
DOI:
关键词: Control theory 、 Upstream (networking) 、 Liquid line 、 Regulator 、 Volumetric flow rate 、 Component (thermodynamics) 、 Degree (temperature) 、 Materials science
摘要: A flow-rate regulator device for controlling a flow rate of liquid includes first component positioned on an upstream side line, and second downstream the line connected in series to component. The adjusts degree opening such that flowing through is set specified number times greater than target when has full opening, be at adjusted have opening.
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