Surface DBD for Deposition of PEO‐Like Plasma Polymers
作者： Ivan Gordeev , Milan Šimek , Václav Prukner , Andrei Choukourov , Hynek Biederman
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摘要: This work investigates the possibility to prepare PEO-like plasma polymers by using an AC surface dielectric barrier discharge in argon with admixtures of di(ethylene glycol) monovinyl ether vapors at atmospheric pressure. The was driven amplitudemodulated regime a driving frequency 5 kHz variable duty cycle 0.2–0.8. Deposition tested for flow rate 0.5–2 slm and various distances between electrode deposition substrates. measurements electro-optical characteristics infrared analysis deposited films were performed fix suitable conditions. Best retention character obtained following conditions: distance substrates 3 mm, 1 slm, excitation high voltage 2.2 kV (peak-to-peak) 0.4.
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