Sol-gel hybrid glass diffractive elements by direct electron-beam exposure
作者： J.T. Rantala , N. Nordman , O. Nordman , J. Vähäkangas , S. Honkanen
DOI: 10.1049/EL:19980368
关键词:
摘要: The authors propose and demonstrate direct electron-beam writing of surface relief diffractive elements into hybrid inorganic/organic sol-gel glass films. etch depth phase delay can be controlled by the electron dose. potential applications include multi-phase-level apodised planar waveguide gratings.
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sci-hub.se 参考文章(6)
S. Iraj Najafi, Introduction to glass integrated optics Artech House. ,(1992)
Mark P. Andrews, S. Iraj Najafi, Passive and active sol gel materials and devices Sol-Gel and Polymer Photonic Devices: A Critical Review. ,vol. 10290, pp. 253- 285 ,(1997) , 10.1117/12.279819
Helmut K. Schmidt, Herbert Krug, Reiner Kasemann, Frank Tiefensee, Development of optical waveguides by sol-gel techniques for laser patterning Submolecular Glass Chemistry and Physics. ,vol. 1590, pp. 36- 43 ,(1991) , 10.1117/12.50199
C.-Y. Li, J.D. Mackenzie, S.I. Najafi, M. Andrews, J. Chisham, N. Peyghambarian, Sol-gel integrated optical coupler by ultraviolet light imprinting Electronics Letters. ,vol. 31, pp. 271- 272 ,(1995) , 10.1049/EL:19950165
N. Nordman, O. Salminen, Thickness variations in amorphous As2S3 films induced by electron beam Solid State Communications. ,vol. 100, pp. 241- 244 ,(1996) , 10.1016/0038-1098(96)00390-0
Nina Nordman, Olli Salminen, Markku Kuittinen, Jari Turunen, Diffractive phase elements by electron‐beam exposure of thin As2S3 films Journal of Applied Physics. ,vol. 80, pp. 3683- 3686 ,(1996) , 10.1063/1.363316