Micro-mirror with electrode spacer
作者： Abdul Jaleel K. Moidu
DOI:
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摘要: A micro-mirror includes stiffer end sections for limiting curvature, and thin middle forming ground electrodes a hinge. Spacers arc provided beneath the of supporting hot electrodes, which attract rotating about tilt axis. The spacers enable gap between electrode to be designed separately from thickness micro-mirror, ends substrate.
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