Surface micromachined optical system with reinforced mirror microstructure

摘要: Various embodiments of reinforced mirror microstructures for a surface micromachined optical system are disclosed. Multi-layered and structurally disclosed, including both two three-layer microstructures. Adjacent structural layers in these multi-layered may be interconnected by plurality vertically disposed columns, or at least generally laterally extending rails ribs, some combination thereof. single layered microstructure with reinforcement assembly that cantilevers from lower thereof is also