Multi-Wire Tri-Gate Silicon Nanowires Reaching Milli-pH Unit Resolution in One Micron Square Footprint.

摘要: The signal-to-noise ratio of planar ISFET pH sensors deteriorates when reducing the area occupied by device, thus hampering scalability on-chip analytical systems which detect DNA polymerase through measurements. Top-down nano-sized tri-gate transistors, such as silicon nanowires, are designed for high performance solid-state circuits thanks to their superior properties voltage-to-current transduction, can be advantageously exploited sensing. A systematic study is carried out on rectangular-shaped nanowires developed in a complementary metal-oxide-semiconductor (CMOS)-compatible technology, showing that width devices below few hundreds nanometers leads higher charge sensitivity. Moreover, composed several wires parallel further increase exposed surface per unit footprint area, maximizing ratio. This technology allows sub milli-pH resolution with sensor about 1 µm2, exceeding previously reported studies two orders magnitude.