Surface characterization of a micro-patterned sample using simultaneous dual-wavelength interferometry with compensation of chromatic aberration
作者： Dahi Ghareab Abdelsalam Ibrahim
DOI: 10.1109/CLEOPR.2017.8119101
关键词:
摘要: Real-time, dual-wavelength interferometry with compensation of chromatic aberration is achieved practically using two identical CCD cameras and bandpass filters for accurate surface micro-topography measurement.
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