High performance 600 V smart power technology based on thin layer silicon-on-insulator
作者： T. Letavic , E. Arnold , M. Simpson , R. Aquino , H. Bhimnathwala
DOI: 10.1109/ISPSD.1997.601428
关键词:
摘要: … 3.0 pm-thick. Complete dielectric isolation processing is straightforward due to the use of a thin SO1 active … The process encompasses three classes of logic and control. Medium-voltage …
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