Symmetric and Asymmetric Double Langmuir Probes Characterization of Radio Frequency Inductivley Coupled Nitrogen Plasma

摘要: The symmetric and asymmetric double Langmuir probe systems with their necessary driving circuits are developed for characterization of low pressure inductively coupled nitrogen plasma, generated sustained 13.56 MHz RF source an automatic impedance matching network. First all, the plasma parameters such as ion saturation current, electron temperature number density determined system at different input powers, filling gas pressures radial distance Received 4 March 2011, Accepted 28 Scheduled 30 2011 Corresponding author: Muhammad Yasin Naz (yasin603@yahoo.com).