Comprehensive Dynamic Model of a Viscously Damped RF-MEMS Switch Including Squeeze Film and Impact Force Effects
作者： Ameen H. El-Sinawi , Omar A. Awad , Abdulaziz H. El-Sinawi
DOI: 10.4028/WWW.SCIENTIFIC.NET/AMM.389.660
关键词:
摘要: This work presents a new approach to modeling the dynamic behavior of viscously damped RF-MEMS switch. The model takes into account effect squeeze film on resonance frequencies switch structure. It also impact force as well its transient pull-in, and release dynamics perforated membrane. Simulation results proposed are validated against experimental same exact switch, comparison was impressive. Model show that is able capture with less than 2% error.
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