Apparatus for driving micromechanical devices

摘要: An interference modulator (Imod) incorporates anti-reflection coatings and/or micro-fabricated supplemental lighting sources. efficient drive scheme is provided for matrix addressed arrays of IMods or other micromechanical devices. improved color provides greater flexibility. Electronic hardware can be field reconfigured to accommodate different display formats application functions. IMod's electromechanical behavior decoupled from its optical behavior. actuation means provided, some one which may hidden view. IMod array fabricated and used in conjunction with a MEMS switch array. switching modulation. Some incorporate 2-D 3-D photonic structures. A variety applications the modulation light are discussed. manufacturing packaging approach based on continuous web fed process. as test structures evaluation residual stress deposited materials.