Modeling and parameter estimation for point-actuated continuous-facesheet deformable mirrors

摘要: We present a variant of the model introduced by Vogel and Yang [J. Opt. Soc. Am. A23, 1074 (2006)] for point-actuated deformable mirrors (DMs) with continuous facesheets, we describe robust efficient regularized- output least-squares computational scheme to estimate parameters in model, given noisy discrete observations DM response known actuation. demonstrate effectiveness this approach experimental data obtained from pair DMs—a piezo-actuated prototype built CILAS Thirty Meter Telescope Project an electrostatically actuated commercial micro-electro-mechanical systems (MEMS) produced Boston Micromachines Corporation.