Plasma generating electrode, its manufacturing method, and plasma reactor
作者： Masaaki Masuda , Yasumasa Fujioka , Kazuhiro Kondo , Kenji Dosaka , Atsuo Kondo
DOI:
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摘要: A plasma generating electrode (1) having two or more plate-shaped unit electrodes (2) opposed to each other and adapted generate a when voltage is applied between the (2). At least one of includes ceramic dielectric body (3) where at surfaces has grooves (5) and/or recesses conductive film (4) provided inside (3). When (2), edge potions (9) formed by surface side recesses, density higher than that generated except for portions its vicinities can be generated.
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