Plasma generator and plasma generating device
作者： Tetsuya Tojo , Hiroshi Makino , Takashige Yagi , Takahito Hirata
DOI:
关键词:
摘要: The plasma generator has the dielectric having inner circumferential surface, and a pair of electrodes which are arranged separated from each other in direction along surface isolated by capable generating on application voltage. In at positions between plan view, recessed portions causing electric field concentration formed.
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