RRAM structure and process using composite spacer

作者: Fu-Ting Sung , Chern-Yow Hsu , Ching-Pei Hsieh , Chia-Shiung Tsai , Shih-Chang Liu

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摘要: A memory cell and method includes a first electrode formed in an opening dielectric layer, the layer being on substrate including metal configured to allow physical contact between having width W 1 extending distance beyond region defined by opening, resistive substantially , capping second 2 less than composite spacer at least two different layers via coupled electrode.

参考文章(3)
Tyler A. Lowrey, Phase change material memory device ,(2001)
Fu-Ting Sung, Chern-Yow Hsu, Wei-Hang Huang, Chia-Shiung Tsai, Shih-Chang Liu, Hole first hardmask definition ,(2013)