Facile bottom-up growth of pyramidally textured ZnO:Al films by combined chemical bathing and DC sputtering deposition

摘要: We developed a facile bottom-up approach to achieve the well-faceted pyramidally textured ZnO:Al (AZO) thin films on non-conductive glass substrates by combining chemical bathing and DC magnetron sputtering deposition. The deposition (CBD) was adopted generate ZnO nanorods (NRs) with terminated plane of (001), followed further growth (101)-faceted AZO pyramidal tips using sputtering. structural, optical, electrical properties were mainly governed size distribution NRs. When length diameter NRs around 450 150 nm, respectively, controlled through CBD process, film grown showed low resistivity 9.7 × 10−4 Ω cm high average transmittance 85.7 % at wavelengths 400–1100 nm. textures brought about maximum haze value 66.0 355 nm an 14.5 355–1100 This proposed simple strategy may benefit studies transparent conducting oxides for high-efficient light harvesting low-cost scalable process.